| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus which can change the attitude of a semiconductor device beforehand that is used in the next step, and can house or convey the semiconductor device. SOLUTION: The semiconductor manufacturing apparatus 1 is provided with a first suction head 11 to suck a semiconductor device 3 in first attitude, a rotary mechanism 12 to turn the first suction head by 90°from the first attitude of the semiconductor device to a second attitude thereof, and a second suction head 31 to suck the semiconductor device in second attitude. COPYRIGHT: (C)2007,JPO&INPIT |
