MICRO-PATTERN FORMING APPARATUS, MICRO-PATTERN STRUCTURE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a forming technique of a practical micro-pattern available for organic matter. SOLUTION: The micro-pattern forming apparatus is equipped with an electro spray means for applying voltage to liquid solution containing a sample to electrostatically spray, a support means (30) for supporting chips (26) where the sample in the liquid solution electrostatically sprayed from the electro spray means is deposited, and a micro mask means (24) which is disposed between the electro spray means and the support means and passes the liquid solution for forming the micro-pattern of the sample on the chips, and where the mask pattern part made of a photo-resist agent having indents formed on the support means side. COPYRIGHT: (C)2007,JPO&INPIT