| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate stage device that can rapidly and tightly make substrates adhere at accurate positions, without leaving gaps on a substrate holder. <P>SOLUTION: The substrate stage device has a substrate stage that moves a substrate, to a position where a predetermined pattern is to be transferred, wherein the device includes a substrate holder 14 to mount a substrate P and a mount assisting mechanism 15a to 15d to temporarily support at least a part of the outer periphery of the substrate upon mounting the substrate on the substrate holder 14. <P>COPYRIGHT: (C)2007,JPO&INPIT |
