MAGNETIC SENSOR DEVICE, MAGNETIC ENCODER DEVICE, AND MAGNETIC SCALE MANUFACTURING METHOD

摘要

Provided is a magnetic encoder device (100) capable of obtaining a high detection accuracy even if a gap dimension between a magnetic sensor device and a magnetic scale changes. The magnetic sensor device (10) detects a rotary magnetic field on the surface of the magnetic scale (9) with a magnetic field intensity higher than a saturation sensitivity region and detects a displacement position of the magnetic scale (9). In the magnetic sensor device (10), +a phase magneto-resistance pattern 25 (+a), -a phase magneto-resistance pattern 25 (-a), +b phase magneto-resistance pattern 25 (+b), and -b phase magneto-resistance pattern 25 (-b) are arranged in a grid pattern on the same surface of a single rigid substrate (10). The +a phase magneto-resistance pattern 25 (+a) and -a phase magneto-resistance pattern 25 (-a) are formed at diagonal positions. The +b phase magneto-resistance pattern 25 (+b) and the -b phase magneto-resistance pattern 25 (-b) are formed at diagonal positions.