| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for putting a defect of an observational object in a view of an electron microscope, etc. without failure, and further making a scale of the apparatus small, in the method and the apparatus for observing the defect detected by an optical foreign matter inspection device or an optical visual inspection device with the electron microscope in detail. <P>SOLUTION: The electron microscope 5 for observing the defect detected by an optical defect inspection device is mounted with an optical microscope 6 for re-detecting the defect, and has a constitution where, when focusing of the optical microscope 6 is performed, a lighting position and a detecting position of the optical microscope 6 to a sample 1 are not changed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
