| 摘要 |
<P>PROBLEM TO BE SOLVED: To irradiate plume on various faces of works of various shapes, in a workpiece processing device applying a given processing by irradiating plume as plasma gas on the workpieces as objects for processing. <P>SOLUTION: A waveguide 10 is provided with a base body waveguide part 11 having an input part 11a into which microwaves generated from a microwave generating device 20 (a microwave generating means) is inputted, and a plurality of branched waveguide parts with one end connected to the base body waveguide part 11 and branching transmitting channels of microwaves. Plasma generating nozzles 31 are fitted to each branched waveguide part 12 so as to be opposed to each other around the workpiece W to enable to irradiate the plume P on the workpiece W arranged between the plurality of waveguide parts 12. <P>COPYRIGHT: (C)2007,JPO&INPIT |
