发明名称 VAPOR DEPOSITION CONTAINER AND VAPOR DEPOSITION MATERIAL EVAPORATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition container and a vapor deposition material evaporating device capable of suppressing bumping occurring when heating a vapor deposition material. SOLUTION: A raised bottom portion 12 is partially provided on a bottom surface of a vapor deposition container 11 for storing a vapor deposition material 14. In a vapor deposition material evaporating device 10 having the vapor deposition container 11, a heater 16 arranged on an outer circumference of the vapor deposition container 11 is provided as a heating means 15, and preferably, a heater 17 arranged facing an outer surface of the raised bottom portion 12 of the container 11 is further provided. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007231370(A) 申请公布日期 2007.09.13
申请号 JP20060054865 申请日期 2006.03.01
申请人 FUJIFILM CORP 发明人 IWASAKI AKINORI;KASHIWATANI MAKOTO
分类号 C23C14/24 主分类号 C23C14/24
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