| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a plasma treatment device for a tube, carrying out given treatments such as cleaning, sterilization, and surface treatment on an inner surface of a tube body, to handle a tube body of a small diameter, by making a plasma generating electrode relatively move toward a tube axis direction. <P>SOLUTION: Out of the plasma generating electrodes 1, an electrode to be relatively moved inside a tube body 10 is only an anode 11 as an inner electrode, and a cathode 12 as an outer electrode is to be formed in a circular shape facing an outer periphery face of the tube body made of an electric insulating material. Then, the tube body 10 is fixed on a pedestal with chucks 52A, 52B, and the cathode 12 and a base end 34 of a cable 3 mounting the anode 11 at the tip are fixed on a carriage 41, which is moved in an arrow mark F to have the tube body 10 inserted into the cathode 12 as well as to have the anode 11 inserted into the tube body 10 in an interlocking movement. Therefore, an inner diameter of the tube body 10 ready to be processed which has hitherto been limited to that larger than an outer periphery of the outer electrode can be made small to a great extent. <P>COPYRIGHT: (C)2007,JPO&INPIT |
