| 摘要 |
A substrate supporting member is provided to prevent damage of a substrate and contamination of equipment caused by malfunction of a driving assembly by monitoring the driving state of a driving assembly for moving up/down a lift pin. A support body(120) has a placement surface on which a substrate is placed. A lift pin(110) is formed on the bottom surface of the support body to place the substrate on the placement surface. A driving assembly moves up/down the lift pin, including a motor, an elevation member and a detection member(172). The elevation member moves up/down the lift pin by the rotation of the motor. The detection member detects the moving-up/down of the elevation member. The elevation member includes a driving bar(140), a rotation axis(160) and a driving axis(150). A long hole is lengthwise formed at one end of the driving bar, and a coupling part coupled to a pin support unit is formed at the other end of the driving bar. The rotation axis supplies a seesaw motion between a first position where the lift pin is moved up by the driving bar and a second position where the lift pin is moved down by the driving bar, positioned between the one end and the other end of the driving bar. The driving axis supplies driving force to seesaw the driving bar, inserted into the long hole. The detection member detects whether the driving bar is positioned between the first and the second positions.
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