发明名称 |
TURBO PUMP GATE UNIT OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT |
摘要 |
A turbo pump gate unit of semiconductor device manufacturing equipment is provided to reduce a process loss time by simplifying a coupling/decoupling structure of a turbo pump gate fixing plate and a turbo pump gate body unit. A turbo pump gate body unit includes a gate valve for opening/shutting an exhaust line between a process chamber and a turbo pump of semiconductor device manufacturing equipment. The turbo pump gate body unit includes a hole to be coupled with a bolt. A turbo pump gate fixing plate(200) includes a hole corresponding to the hole of the turbo pump gate body unit in order to be fixed to the turbo pump gate body unit. A thread(204) is formed in the hole of the turbo pump gate fixing plate. The bolt is inserted into the hole of the turbo pump gate body unit and is coupled with the thread of the hole of the turbo pump gate fixing plate.
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申请公布号 |
KR20070091733(A) |
申请公布日期 |
2007.09.12 |
申请号 |
KR20060021222 |
申请日期 |
2006.03.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
NA, HEE YOUNG |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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