发明名称 AUTO-FOCUSING APPARATUS
摘要 <p>An auto-focusing apparatus is provided to perform a focus control in real time by using a laser beam and a video signal when a laser beam signal is not inputted normally. The auto-focusing apparatus includes a laser emitting unit(10), a lens assembly(20) arranged between the laser emitting unit and a transfer path(2) of a workpiece(W), a laser detection sensor(30) arranged at a first position on a propagation path with respect to a reflected laser light passing through the lens assembly, a video camera(40) arranged at a second position on the propagation path with respect to the reflected laser light, an optical member(50) for simultaneously or selectively directing the reflected laser light to the laser detection sensor and the video camera, supporting frames(4,6) for supporting the lens assembly and the workpiece, respectively, a driving mechanism for minutely position-adjusting the supporting frames in order to control a focus between the lens assembly and the workpiece, and a controller(100).</p>
申请公布号 KR100758198(B1) 申请公布日期 2007.09.12
申请号 KR20060103866 申请日期 2006.10.25
申请人 HIMS CO., LTD.;KIM, JU HOAN 发明人 KIM, JU HOAN
分类号 H01L21/027 主分类号 H01L21/027
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