| 摘要 |
The invention relates to a sensor ( 1 ) for helium or hydrogen with a vacuum-tight housing ( 2 ), wherein a gas consuming cold cathode array ( 3, 4 ) is arranged, in addition to a selectively active passage ( 9 ) for the gas to be detected. According to the invention, in order to improve the properties of said sensor, the housing ( 2 ) is made of glass, components of the gas passage ( 9 ) include a membrane ( 18 ) made of a silicon material having the desired selective qualities, in addition to a silicon plate ( 19 ) which supports the membrane ( 18 ) and is provided with a plurality of openings ( 21 ) and a heating element ( 24 ). The housing ( 2 ) and the selectively active gas passage ( 9 ) are joined together without polymer and elastomer.
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