| 摘要 |
<p>A substrate transfer apparatus is provided to make a substrate slide up or down along a back guide disposed in a back finger when the substrate is loaded or unloaded onto/from a chuck by disposing a protrusion in the front finger. A main arm(120) moves back and forth or elevates. A hand part(130) is disposed at the end of the main arm. A finger part(140) is disposed along the inner circumference of the hand part, including a first placement plate(142a) and a front finger(140b). The first placement plate supports a substrate. The front finger includes a vertical wall(144b) vertically disposed in the first placement plate and a protrusion(146b) protruding from the vertical wall. The hand part can have an open ring shape, and the front finger can be disposed at both ends of the hand part.</p> |
