| 摘要 |
An image measuring method comprises making no stop of an imaging means relative to a measurement stage at measurement positions (MP 1 -MP 3 ), and capturing instantaneous images to acquire information required for measurement. A first direction to a measurement position (MP 1 ) to be measured next and a second direction from the measurement position (MP 1 ) to a next measurement position (MP 2 ) form an angle therebetween. If this angle exceeds a certain angle, an overshoot path is formed at a location beyond the measurement position (MP 1 ) in the first direction. The larger the angle formed between the first direction and the second direction, the lower the measurement speed at the measurement position (MP 1 ) is made.
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