发明名称 |
Method and system for fabricating three-dimensional microstructure |
摘要 |
A method of fabricating a three-dimensional microstructure provides data corresponding to information relating to the structure of a three-dimensional microstructure design. A sample is processed in accordance with the provided data by irradiating the sample with a charged-particle beam while controlling processing conditions of the charged-particle beam. Dimensions of the processed sample are compared with the provided data to identify differences between the structure of the processed sample and the structure of the three-dimensional microstructure design. The sample is then irradiated again with a charged-particle beam to correct the identified structural differences while adjusting the processing conditions of the charged-particle beam to thereby fabricate a three-dimensional microstructure having a structure substantially the same as the structure of the three-dimensional microstructure design.
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申请公布号 |
US7267731(B2) |
申请公布日期 |
2007.09.11 |
申请号 |
US20030712147 |
申请日期 |
2003.11.13 |
申请人 |
SII NANOTECHNOLOGY INC. |
发明人 |
IWASAKI KOUJI |
分类号 |
B81C99/00;C21D1/54;C23C16/04;C23C16/48;H01J37/302 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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