发明名称 Method and system for fabricating three-dimensional microstructure
摘要 A method of fabricating a three-dimensional microstructure provides data corresponding to information relating to the structure of a three-dimensional microstructure design. A sample is processed in accordance with the provided data by irradiating the sample with a charged-particle beam while controlling processing conditions of the charged-particle beam. Dimensions of the processed sample are compared with the provided data to identify differences between the structure of the processed sample and the structure of the three-dimensional microstructure design. The sample is then irradiated again with a charged-particle beam to correct the identified structural differences while adjusting the processing conditions of the charged-particle beam to thereby fabricate a three-dimensional microstructure having a structure substantially the same as the structure of the three-dimensional microstructure design.
申请公布号 US7267731(B2) 申请公布日期 2007.09.11
申请号 US20030712147 申请日期 2003.11.13
申请人 SII NANOTECHNOLOGY INC. 发明人 IWASAKI KOUJI
分类号 B81C99/00;C21D1/54;C23C16/04;C23C16/48;H01J37/302 主分类号 B81C99/00
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