| 摘要 |
A loadlock chamber is provided to make an internal construction of the chamber simple by integrally forming a substrate loading part on a base plate of a body, thereby easily carrying out the maintenance thereof. A load-lock chamber includes a body(10) having a sidewall and a base plate(11), and a cover(20) engaged to an upper surface of the body. A substrate loading part is integrally formed on the base plate, and has a loading surface(12) on which a substrate is loaded, and an entry(16) through which an arm of a carriage robot passes. The loading surface and the entry are formed in concave and convex shapes. The base plate is provided with a coolant passage(21) in a thickness direction of the base plate, and the coolant passage has an coolant inlet(13) and a coolant outlet(14).
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