| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a patterned film with high accuracy by using an aerosol deposition method. <P>SOLUTION: The method includes: steps S11 and S12 of laying a plurality of mask layers on a substrate or on an electrode formed on the substrate, the mask layer including at least one layer of a soft mask layer made of a soft material and at least one layer of a hard mask layer made of a hard material; a step S13 of spraying a powder comprising a brittle material to the mask forming surface of the substrate and allowing the power to collide with the lower layer to deposit to form a brittle material layer; and a step S14 of removing the plurality of mask layers. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
