A substrate transfer robot is provided to increase the maximum distance to transfer a substrate and to decrease the minimum rotational radius in a rotating operation. A substrate transfer robot(1) comprises an arm frame(700), a horizontal arm unit(800), and a hand unit(900). The arm frame is separated from a rotating shaft(400) to a substrate transfer direction and formed with one end fastened with a vertical guide and lifted along the vertical guide. The one end of the horizontal arm unit is movably fastened with the other end of the arm frame and extended to the substrate transfer direction. The one end of the hand unit is movably fastened with the other end of the horizontal arm unit to pick up a substrate(100).
