| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long life cooling block capable of meeting the requirements of an electrode, and preventing corrosion as a cooling block configuring a plasma generation electrode for plasma treatment. <P>SOLUTION: This cooling block is fabricated by joining a first aluminum base material and a second aluminum base material in a heating environment containing oxygen with zinc between the base materials, while a concave for forming a coolant channel is machined on either or both of the base materials so that a diffusion bonding layer with zinc diffused in aluminum and an anti-corrosion layer made of zinc oxidized films can be formed simultaneously. In addition, it is desirable that the amount of zinc included in the zinc oxidized films is 30 g or more per 1 m<SP>2</SP>, and a brazing material such as nickel may lie between the first and second base materials. <P>COPYRIGHT: (C)2007,JPO&INPIT |
