| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection device which images a workpiece without stopping it by moving a conveyance stage and an imaging device synchronously. SOLUTION: The device comprises: the conveyance stage 3 for conveying the inspection workpiece 1 to a prescribed inspection position; a displacement sensor 4 for detecting each height in the optical axis direction of prescribed two points of the workpiece until the work reaches the inspection position; an imaging device 5 whose position in the optical axis direction is held within a focal point depth on the inspection position, having shutter speed of 1/20,000 for imaging the workpiece appearance; an image processing device 8 for processing an image imaged by the imaging device; and a control device 9 for moving the conveyance stage from prescribed one point to the other point of the workpiece, and adjusting the position in the optical axis direction of the imaging device synchronously with movement of the conveyance stage. COPYRIGHT: (C)2007,JPO&INPIT
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