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发明名称
METHODS OF INSPECTING PATTERN MASKS
摘要
申请公布号
EP0094501(B1)
申请公布日期
1987.04.01
申请号
EP19830103295
申请日期
1983.04.05
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
VETTIGER, PETER;WILSON, ALAN DICKSON
分类号
G01B15/00;G01N21/88;G01N21/956;H01J37/304;H01L21/027;H01L21/66;(IPC1-7):G03B41/00
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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