| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of performing an environmental test in a more similar state to an actual using environment by reproducing temperature variation generated in a test object. SOLUTION: This device includes a temperature dispersion detection means 35 for monitoring the temperature dispersion on a substrate in addition to a constant-temperature constant-humidity tank 3 for adjusting the internal environment. The temperature dispersion detection means 35 comprises three temperature sensors 36, 37, 38. An air blower 20 is controlled so that the temperature dispersion is in a proper range, and the air blowing amount is increased/decreased. When the temperature dispersion is small, wind velocity is lowered. COPYRIGHT: (C)2007,JPO&INPIT
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