| 摘要 |
PROBLEM TO BE SOLVED: To efficiently sense the crack of a substrate by a simple constitution. SOLUTION: This crack sensor of the substrate B is arranged to a substrate treatment apparatus 1 and has leading end sensors 30A and 30B corresponding to the leading end of the substrate B set at a feed starting position P, rear end sensors 30C and 30D corresponding to the rear end of the substrate B and a control part 38A. Each of the sensors 30A-30D has a sensor head 32 and a sensor amplifier 36 and the substrate B is irradiated with light while the reflected light is detected by the sensor head 32 and the signal corresponding to the sensing state of the reflected light is outputted from the sensor amplifier 36. The control part 38A senses the crack of the substrate B on the basis of the signals outputted from the respective sensors 30A-30E. Further, when the light sensing state changes from a substrate absent-state to a substrate present state, each of the leading end sensors 30A and 30B delays the signal output corresponding to the change by a definite period so that the output signal of each of the sensors 30A and 30B becomes a signal always having a time width larger than the minimum time width capable of being process by the control part 38A. COPYRIGHT: (C)2007,JPO&INPIT
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