发明名称 |
Surface Defect Inspecting Method And Device |
摘要 |
A method of inspecting an inspection target surface comprises: irradiating an irradiation light having a predetermined pattern on the inspection target surface; imaging the surface irradiated with the irradiation light; and inspecting the inspection target surface based on an obtained image of the inspection target surface. The irradiation light irradiated from an irradiation face has a mesh-like pattern including meshes of a same shape. Each mesh has an irradiation area smaller than a non-irradiation area in a plane normal to the optical axis. The inspection target surface is inspected based on lightness/darkness information of an image area in the obtained image corresponding to a non-irradiated area in the inspection target surface. A light point having intermediate brightness and formed in a dark face formed within the mesh is extracted as a defect candidate.
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申请公布号 |
US2007206182(A1) |
申请公布日期 |
2007.09.06 |
申请号 |
US20040576486 |
申请日期 |
2004.10.20 |
申请人 |
DAIHATSU MOTOR CO., LTD. |
发明人 |
ISHIKAWA CHIE;IWATA MAKOTO;SAKAUE MAMORU;KUROKI KEISUKE |
分类号 |
G01N21/00;G01B11/30;G01N21/88;G01N21/94 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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