ENVIRONMENT-RESISTANT MEMBER, APPARATUS FOR MANUFACTURING SEMICONDUCTOR, METHOD FOR PRODUCING ENVIRONMENT-RESISTANT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide an environment-resistant member having a thermal-sprayed ceramic film to be hardly peeled off formed on a substrate; a production method therefor; and an apparatus using the environment-resistant member for manufacturing a semiconductor.

SOLUTION: A unit operation comprises the steps of: placing the substrate 1 in an atmosphere of the first raw gas containing an element selected from the element group of aluminum and the like; making the gas adsorbed onto the surface of the substrate; subsequently, changing the atmosphere in which the substrate is placed to that of the second raw gas which reacts with the first raw gas; and forming an oxide layer containing the above elements. The method for producing the environment-resistant member comprises the steps of: repeating the above unit operation several times to form an intermediate layer F2 formed of the above deposited oxide layer; and forming the thermal-sprayed ceramic film F1 on the surface of the intermediate layer F2 with a thermal spraying technique.

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