| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission electron source excellent in stability and controllability of electron emission and the like. <P>SOLUTION: This field emission electron source comprises a plurality of carbon film blocks 14 arranged on a substrate 12, each of the carbon film blocks 14 comprising a plurality of needle-like carbon films 16 with tapered tips formed in a substantially fixed tip height substantially vertically to the substrate surface. The carbon film blocks 16 are arranged on the substrate 12 at intervals controlled so that the mutual space (block space) does not inhibit the respective field emissions. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
