| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel charged particle beam drawing method in which the joint of shot is made smooth. SOLUTION: First field division of drawing pattern data is carried out and the drawing pattern data included in each field is divided along the X direction to obtain X division data. Second field division of the drawing pattern data is carried out such that the division border line is shifted slightly, and the drawing pattern data included in each field is divided along the Y direction to obtain Y division data. When shot division of the X division data and the Y division data is carried out, shot division is carried out such that the shot division lines differ from each other to obtain first shot division data and second shot division data. Based on each shot division data, drawing is performed with a dose equal to one half of the dose for exposing a photosensitive material. COPYRIGHT: (C)2007,JPO&INPIT
|
