| 摘要 |
PROBLEM TO BE SOLVED: To provide a connection tool used for a substrate inspection device for bringing a tip part of an inspecting contact into contact with a substrate of an inspection object to inspect quality of the substrate, and also to provide a method of manufacturing the contact tool. SOLUTION: The method includes manufacturing the contact tool for connecting electrically a multistylus contact pressure-contacting with a plurality of inspection points set on a wiring pattern of the inspected substrate, to an inspection signal processor for receiving an electric signal from the substrate to conduct inspection. A prescribed thickness of conductive substance layer is formed of a powdery conductive substance, a prescribed position in the conductive substance layer is irradiated with a laser beam to sinter the conductive substance, a new conductive substance layer is overlaid onto the conductive substance layer, a prescribed position in the new conductive substance layer is irradiated with the laser beam to be sintered, the process hereinbefore is repeated until the conductive part is formed as a conductive path for making the substrate inspection device electrically connectible to the each inspection point, and the conductive substance not yet sintered is removed after the conductive path is formed. COPYRIGHT: (C)2007,JPO&INPIT
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