VACUUM ARC SOURCE COMPRISING A DEVICE FOR GENERATING A MAGNETIC FIELD,申请号EP20030753214-传众专利搜索

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发明名称	VACUUM ARC SOURCE COMPRISING A DEVICE FOR GENERATING A MAGNETIC FIELD
摘要
申请公布号	EP1576641(B1)	申请公布日期	2007.09.05
申请号	EP20030753214	申请日期	2003.10.30
申请人	OC OERLIKON BALZERS AG	发明人	SCHUETZE, ANDREAS;WOHLRAB, CHRISTIAN
分类号	H01J37/32;C23C14/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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