METHODS AND COMPOSITIONS FOR FORMING APERIODIC PATTERNED COPOLYMER FILMS
摘要
<p>The present invention provides improved and compositions methods for replicating substrate patterns including patterns containing irregular features. The methods of the invention involve depositing block copolymer materials on a patterned substrate and ordering components in the material to replicate the pattern. In some embodiments, ordering is facilitated through the use of blends of the copolymer material and/or configuring substrate patterns so that regions of the substrate pattern interact in a highly preferential manner with at least one of the components in the copolymer material. The invention also provides compositions containing a substrate pattern with irregular features replicated in a block copolymer material.</p>
申请公布号
EP1827717(A2)
申请公布日期
2007.09.05
申请号
EP20050857837
申请日期
2005.11.22
申请人
WISCONSIN ALUMNI RESEARCH FOUNDATION
发明人
NEALEY, PAUL F.;KIM, SANGOUK;EDWARDS, ERIK, W.;STOYKOVICH, MARK, P.;DE PABLO, JUAN, J.