发明名称 Methods for making microwave circuits
摘要 Disclosed are methods for making microwave circuits using thickfilm components. In an embodiment, the method includes depositing a dielectric over a ground plane, and then forming a conductor on the dielectric. The conductor is formed by depositing a conductive thickfilm on the dielectric and then "subsintering" the conductive thickfilm. In one embodiment, before the subsintering, the conductive thickfilm is patterned to define at least one conductor. In another embodiment, after the subsintering, the conductive thickfilm is patterned to define at least one conductor. After subsintering, the conductive thickfilm is etched to expose the conductor(s), and the conductor(s) are then fired at a full sintering temperature.
申请公布号 US7265043(B2) 申请公布日期 2007.09.04
申请号 US20060510102 申请日期 2006.08.25
申请人 发明人
分类号 H01L21/44 主分类号 H01L21/44
代理机构 代理人
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