发明名称 Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
摘要 Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
申请公布号 US7265838(B1) 申请公布日期 2007.09.04
申请号 US20040925333 申请日期 2004.08.24
申请人 J.A. WOOLLAM CO., INC. 发明人 JOHS BLAINE D.;HE PING;LIPHARDT MARTIN M.;GOEDEN CHRISTOPHER A.;WOOLLAM JOHN A.;WELCH JAMES D.
分类号 G01J4/00 主分类号 G01J4/00
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