PLASMA PROCESSING APPARATUS HAVING INNER FERRITE CORE OF THE CHAMBER,申请号KR20050039065-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS HAVING INNER FERRITE CORE OF THE CHAMBER
摘要
申请公布号	KR100752439(B1)	申请公布日期	2007.08.24
申请号	KR20050039065	申请日期	2005.05.10
申请人		发明人
分类号	H05H1/34	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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