发明名称 SUBSTRATE CARRIER, DISPLAY PANEL MANUFACTURING DEVICE USING THE SAME; AND SUBSTRATE CARRYING METHOD, AND DISPLAY PANEL MANUFACTURING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To enhance the space efficiency of a substrate carrier and a display panel manufacturing device. SOLUTION: In the substrate carrier 10, a carrier robot 13 is moved along a carrying passage 12 having a working device 35, and the first substrate 31 which is working-completed by the working device 35 is carried out. A second substrate 32 forming a pair with the first substrate 31 can be carried out through the working device 35 by moving the carrier robot 13 along the same carrying passage 12 as that of the first substrate 31. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007210757(A) 申请公布日期 2007.08.23
申请号 JP20060033070 申请日期 2006.02.09
申请人 SHIBAURA MECHATRONICS CORP 发明人 KOJIMA JUNICHI
分类号 B65G49/06;B25J5/02;G02F1/13;G02F1/1333;H01L21/677 主分类号 B65G49/06
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