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发明名称
Aus Halbleitermaterial hergestellter integrierter Kreisel mit wenigstens einer empfindlichen Achse in der Sensorebene
摘要
申请公布号
DE60221103(D1)
申请公布日期
2007.08.23
申请号
DE20026021103
申请日期
2002.05.21
申请人
STMICROELECTRONICS S.R.L., AGRATE BRIANZA
发明人
SPINOLA DURANTE, GUIDO;ZERBINI, SARAH;MERASSI, ANGELO
分类号
G01C19/56;G01P15/00;G01P15/125
主分类号
G01C19/56
代理机构
代理人
主权项
地址
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