| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device, capable of accurately calculating measurement points, even when the shape of a contactor is not an ideal sphere, and to provide shape measurement method and program therefor. SOLUTION: The shape measuring device comprises an pseudo-measurement point acquiring section 212 for acquiring position coordinates of the reference point of the contactor, when the contactor is contacted to an object to be measured at a plurality of points; a normal vector producing section 213 for estimating the surface or the line along the pseudo-measurement point from the pseudo-measurement point, to calculate the normal vector from each pseudo-measurement point to the surface or the line; a contactor model arranging section 214 for making the reference point of the contactor model that specifies the surface shape of the contactor with the attitude of the contactor with that of the contactor model, to arrange the contactor model; and a measurement point calculating section 215 for calculating the intersection points with each of the normal vectors and each of surfaces of the contactor models arranged, as a measurement point. COPYRIGHT: (C)2007,JPO&INPIT
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