| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for correcting the minute defect of a mold which can cause the destruction of the mold in an imprint method and the defect of a transfer pattern and a corrected mold. SOLUTION: The minute defect of the mold is corrected by laser-annealing only the surface of the mold. By using laser annealing which is a relatively low temperature process, only the minute defect of the surface of the mold can be annealed, so that only the minute defect can be corrected without deforming the pattern shape of the mold. Since the minute defect of the mold which causes the destruction of the mold by an imprint and the defect of the transfer pattern can be reduced, the extension of the life of the mold and the formation of a good transfer pattern with defects reduced are made possible. Remarkable cost reduction of the imprint method by the extension of the life of the mold and a high quality transfer pattern can be expected. COPYRIGHT: (C)2007,JPO&INPIT
|
