| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manual cleaner of a proximity exposure apparatus for easily cleaning a work stage and a mask stage without vertically moving the mask stage. <P>SOLUTION: The cleaner comprises a belt type cleaning sheet 32 having a tacky surface 32a, a roll 34 which can be inserted as wrapped with the cleaning sheet into a narrow space between the mask stage 1 and the work stage 2, and a handle 36 linked with the roll as rotatable to insert the roll to the narrow space. The roll inserted into the narrow space by holding the handle is reciprocally moved near the surface to be cleaned, so that the roll is normally rotated in an outward path to pull out the cleaning sheet and to adhere the tacky surface of the sheet to the surface to be cleaned and that the roll is reversely rotated in a return path to wind up the cleaning sheet having adhered to the surface to be cleaned on the roll. <P>COPYRIGHT: (C)2007,JPO&INPIT |
