| 摘要 |
PROBLEM TO BE SOLVED: To specify a using tool, in a fluid piping system for supplying a fluid to a plurality of tools by one supply flow passage. SOLUTION: The fluid piping system for supplying the fluid to the plurality of tools by the one supply flow passage 5 includes a flow measuring part 6 arranged in the supply flow passage 5, a detecting part 7 for the start of tool use, a control part 8 for the flow measuring part 6, and a judging part 9 for specifying the using tool, based on a signal from the flow measuring part 6. The flow measuring part is controlled thereby to enhance determination precision for the tool. COPYRIGHT: (C)2007,JPO&INPIT
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