发明名称 Method for coating substrates uses a vaporized material having a relative speed which is zero relative to all points of a vaporizing source during the coating process
摘要 <p>Method for coating substrates (1) uses a vaporized material (3) having a relative speed which is zero relative to all points of a vaporizing source (6) during the coating process. An independent claim is also included for a device for coating substrates.</p>
申请公布号 DE102007008674(A1) 申请公布日期 2007.08.23
申请号 DE20071008674 申请日期 2007.02.20
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 HECHT, CHRISTIAN;KAMMER, MANFRED;REINHOLD, EKKEHART;WENZEL, BERND-DIETER
分类号 C23C14/30 主分类号 C23C14/30
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