DRY ETCHING METHOD, MICROSTRUCTURE FORMING METHOD, MOLD AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To realize a vertical cross-sectional shape or an ordered tapered cross-sectional shape in the case micro-ruggedness is formed on a substance comprising tungsten and carbon by dry etching, and to provide a mold in which the surface of a substance comprising tungsten and carbon is provided with micro-ruggedness with a vertical cross-sectional shape or an ordered tapered cross-sectional shape. SOLUTION: Regarding the dry processing method, an object comprising tungsten and carbon is subjected to etching using plasma generated from a gaseous mixture composed of a gas containing fluorine atoms and a gas having CN bonds and hydrogen atoms. COPYRIGHT: (C)2007,JPO&INPIT