| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of reliably electrically connecting the a first substrate to a second substrate. SOLUTION: A connecting member 6 is formed by connecting a first connecting part 61 and a second connecting part 62 which are each easily deformed in different directions in a plane in parallel with a contact substrate 4 and a main substrate 5. It is thereby possible to form the connecting member 6 which is easily deformed in any direction in parallel with the contact substrate 4 and the main substrate 5. Since it is therefore possible to prevent the junction between each of electrodes 41 and 51 and the connecting member 6 from separating and the connecting member 6 from being damaged in the case that the contact substrate 4 and the main substrate 5 are thermally expanded, it is possible to more reliably electrically connect the contact substrate 4 to the main substrate 5. COPYRIGHT: (C)2007,JPO&INPIT
|
