ETCHING ALUMINUM OVER REFRACTORY METAL WITH SUCCESSIVE PLASMAS,申请号KR20000047139-传众专利搜索

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发明名称	ETCHING ALUMINUM OVER REFRACTORY METAL WITH SUCCESSIVE PLASMAS
摘要
申请公布号	KR100751126(B1)	申请公布日期	2007.08.22
申请号	KR20000047139	申请日期	2000.08.16
申请人		发明人
分类号	H01L21/306;C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L21/336;H01L23/52;H01L29/78;H01L29/786	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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