| 摘要 |
The soft magnetic thin film (24, 30) has high saturation magnetic flux density and superior soft magnetic characteristics, and is suitable for use as a magnetic film of a magnetic head of a magnetic disk drive unit. The soft magnetic thin film (24, 30), which is made of an alloy including two or three elements selected from a group consisting of Fe, Co and Ni, is formed by an electrolytic plating process, and internal stress of the plated film is 400 MPa or more.
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