发明名称 Hermetically sealing a package to include a barrier metal
摘要 A method for manufacturing an electronic device includes the steps of forming a first resist pattern on a primary surface of a SAW element, the first resist pattern having openings at positions corresponding to those at which bumps and a sealing frame are to be formed, sequentially forming metals over the first resist pattern, the metals being formed into adhesion layers, barrier metal layers, and solder layers, removing the first resist pattern on the SAW element such that the bumps and the sealing frame are simultaneously formed. When the bumps and the sealing frame of the SAW element are bonded to bond electrodes of the bond substrate, the solder layers are melted and alloyed by heating.
申请公布号 US7259032(B2) 申请公布日期 2007.08.21
申请号 US20030713253 申请日期 2003.11.17
申请人 MURATA MANUFACTURING CO., LTD. 发明人 MURATA KOJI;IWAMOTO TAKASHI;HORIGUCHI HIROKI;KUBO RYUICHI;FUJII HIDETOSHI;AIZAWA NAOKO
分类号 H01L21/00;H01L21/60;H01L41/053;H03H3/02;H03H3/08;H03H9/05;H03H9/25;H03H9/56 主分类号 H01L21/00
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