| 摘要 |
A substrate transfer apparatus is provided to improve the reliability of a substrate transfer process by minimizing the generation of sliding under the substrate transfer process by using a connection groove and an alignment member with a protruded end portion. A substrate transfer apparatus includes a cam shaft, a connection unit connected to cam shaft, arm wrist connected to an end portion of the connection unit, and substrate loading unit(100) with protrusions prolonged from a side portion of the arm wrist for loading stably a substrate. A connection groove(110) is formed through the substrate loading unit at an end portion. An alignment member(120) is formed in the connection groove. The alignment member has a protruded end portion.
|
