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发明名称
抗蚀剂处理液的再生方法及装置
摘要
本发明涉及一种抗蚀剂处理液的再生方法及其装置。尤其涉及一种,从包含用于图形化电路或显示元件金属布线的抗蚀剂膜的基板上剥离抗蚀剂后,使从抗蚀剂剥离工序所排出的含抗蚀剂处理液接触于多相光催化剂,从而剥离及分解抗蚀剂的方法及装置。该方法及装置不仅可以剥离残留在图形化金属膜上的抗蚀剂,还可以分解工艺过程中所产生的、并包含在处理液中的抗蚀剂成份,因此能够最大限度地减小在高温下因挥发而引起的成份变化及药液疲劳度,而且能够将对图形化金属膜的腐蚀降到最低。
申请公布号
TW200731030
申请公布日期
2007.08.16
申请号
TW096104507
申请日期
2007.02.07
申请人
东进世美肯股份有限公司
发明人
尹锡壹;金圣培;郑宗铉;许舜范;金柄郁
分类号
G03F7/42(2006.01)
主分类号
G03F7/42(2006.01)
代理机构
代理人
刘緖伦
主权项
地址
韩国
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