| 摘要 |
PROBLEM TO BE SOLVED: To realize an energy filter with large gap parts where coils are set up, while securing a magnetostatic space of a given length along a flight path of charged particles. SOLUTION: A length of a core 32 along the flight path 90 is set shorter than that of a pole piece 31, and gaps 37, 38 are made larger than a cross section of a loop-like metal conductor constituting coils 36, so that coils with a large current-carrying capacity can be arranged without the coils 36 getting in touch with the pole piece 31 or the core 32, and at the same time, heat generated at the coils 36 is prevented from diffusing around. Further, the processing man-hour can be reduced, and similar results can be obtained if a pole piece & core 41 of a structure integrating the core 32 and the pole piece 31 is used. COPYRIGHT: (C)2007,JPO&INPIT
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