发明名称 UV blocking and crack protecting passivation layer fabricating method
摘要 A method for fabricating a semiconductor device includes providing a semiconductor substrate comprising a patterned metal conductor layer. To provide UV blocking, an overlying separation layer is formed over the substrate, and a UV blocking layer of silicon enriched oxide is formed over the separation layer. The UV blocking layer has a silicon atomic concentration sufficient for ultraviolet blocking. A gap-filling, hydrogen-blocking layer may be formed over the semiconductor substrate, and any the UV blocking layer, to prevent hydrogen from passing therethrough.
申请公布号 US2007190806(A1) 申请公布日期 2007.08.16
申请号 US20060352425 申请日期 2006.02.10
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 CHEN LEE J.;LUO SHING A.;SU CHIN T.
分类号 H01L21/469 主分类号 H01L21/469
代理机构 代理人
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