| 摘要 |
PROBLEM TO BE SOLVED: To provide a static-electricity removing apparatus and method whereby the static electricity charged on a substrate can be removed therefrom favorably while increasing the efficiency of manufacturing processes. SOLUTION: A processor has a stage 12 for mounting thereon a substrate, and has a lifting pin 16 for inserting it into the stage 12 and for projecting or retracting its end from or in the stage 12 to make the substrate rise or fall. Flow passages (21a, 22a, 23a) for spraying the ionized gas fed from an ionizer on the rear surface of the substrate are formed in the lift pin 16. COPYRIGHT: (C)2007,JPO&INPIT |
